Onto Innovation has completed its previously announced acquisition of a 27% minority equity stake in Rigaku Holdings Corporation from Atom Investment, an affiliate of Carlyle, for approximately $720 million.
The investment deepens a strategic collaboration between Onto Innovation and Rigaku that was first announced in April 2026.
The companies are working together to advance next-generation X-ray technologies for semiconductor manufacturing process control.
Onto Innovation sees growing demand for new process control technologies as semiconductor manufacturers increasingly adopt complex three-dimensional chip architectures and advanced materials.
These changes are making it more difficult for manufacturers to understand and control critical fabrication processes, creating additional demand for metrology, inspection and analytical technologies.
The collaboration with Rigaku is intended to expand Onto Innovation’s ability to provide more comprehensive process control solutions as customers move next-generation semiconductor technologies into high-volume manufacturing.
Onto Innovation will account for its Rigaku investment using the fair value option method and will not consolidate Rigaku’s financial results.
The company will also nominate a director to serve on Rigaku’s board.
Onto Innovation develops process control technologies used throughout semiconductor manufacturing.
Its portfolio includes unpatterned wafer quality systems, 3D metrology covering structures ranging from nanometer-scale transistors to large die interconnects, macro defect inspection for wafers and packages, metal interconnect composition analysis, factory analytics and lithography systems for advanced semiconductor packaging.
The company believes combining its existing capabilities with Rigaku’s X-ray expertise could help address increasingly difficult yield, device performance, reliability and quality challenges throughout the semiconductor production process.
The investment also gives Onto Innovation a significant economic interest in Rigaku while allowing both companies to continue operating independently.
KEY QUOTES:
“As semiconductor innovation advances rely increasingly on more complex 3D architectures and exotic materials, our customers face growing challenges in understanding and controlling their most critical manufacturing processes.”
“We are excited by the initial success of our collaboration. This investment strengthens our partnership, accelerates innovation, and enhances our ability to provide more holistic process control solutions to support our customers as they introduce the next generation of semiconductor technologies into high-volume production.”
Mike Plisinski, Chief Executive Officer of Onto Innovation
